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TECHNIKON Forschungs- und Planungsgesellschaft, (Coordinator) Austria
>> Contact Persons: Klaus-Michael KOCH, Tanja SCHELIESSNIG
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LAM Research, (Technical leader) Austria
>> Contact persons: Harald OKORN-SCHMIDT, Martin KÖFFLER
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ELSYCA NV, Belgium
>> Contact Persons: Gert NELISSEN, Luc WANTEN
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Katholieke Universiteit Leuven, MTM-KUL, Belgium
>> Contact Persons: Jan FRANSAER, Marc DE BONTE
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Institute FELMI, Graz University of Technology, Austria
>> Contact Persons: Gerald KOTHLEITNER, Harald PLANK
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Infineon Technologies AG, Germany
>> Contact Persons: Raimund FÖRG, Werner ROBL
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CORMET OY, Finland
>> Contact Persons: Juha PIIPPO, Jukka VÄINÖLÄ
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Vrije Univeriteit Brussel, Department ETEC , Belgium
>> Contact Persons: Johan DECONINCK, Steven VAN DAMME
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